Specialty Process Gas Monitors
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 OPTI-Sense Series

 Non-Dispersive Infrared Monitors


  • NDIR Non-Dispersive Infrared
  • Ideal for any infrared-absorbing gases (SiF4, SiF3, CO, CO2, CF4, SF6, NF3, WF6 and other species)​
  • Fast response time
  • High sensitivity
  • Species specific
  • No consumables
  • No moving parts
  • GUI LabView software (optional)


Maintenance section coming soon.




ESD Fundamentals - 04786.pdfFundamentals of Electro-Static Discharge (ESD)216 KB
SAL000096A - NDIR.pdfOPTI-Sense Specification2939 KB
SAL000096A-CN NDIR.pdfOPTI-Sense规格 (Chinese Specification)2130 KB
SAL000107A - Industrial Gas Instruments Overview.pdfIndustrial Gas Instruments Overview555 KB


Measuring Principle
Non Dispersive IR absorption
Application In Situ Measurement
Light Source Pulsed IR Emitter
Corrosion Resistant Optics, Stainless Steel Wetted Parts​
Dimensions (WxHxD) 
5.00" x 8.75" x 3.25" (including source and detector) 
< 5 lbs
Analog Output
Factory set to 0-1, 5 or 10 volt
​​ Digital Interface
RS-232 C and optional GUI interface​
Response Time
< 10 seconds
Power Requirements
15 VDC - Less than 10 watts (AC Power Optional)
Sample Ports KF16 - 304 SS (other options available)
Remote Zeroing Capability
Leak Testing Vacuum Leak-Tight Cell
Embedded (standard) - LabView GUI Interface (optional)
​​1 year



The OPTI-Sense series of sensors is based on Non-Dispersive Infrared (NDIR) technology. They are designed to precisely
measure the absorbance in the infrared spectrum of specialty gases typically found in semiconductor applications. They are
very compact and designed with no moving parts, making the OPTI-Sense robust and ideal for continuous in-situ gas monitoring of semiconductor processes.

​Built-in diagnostics are included in the embedded software. All OPTI-Sense sensors are configured with analog and digital
interfaces, making them easy to integrate into any process.