Specialty Process Gas Monitors
​​​​​​​​​​​​​​​​​​​​​ Conta​​​ct us
Sales Contacts
Request a Quote
Terms & Conditions
​​ ​

 OPTI-Sense Series

 Non-Dispersive Infrared Monitors



  • Non-Dispersive Infrared (NDIR)
  • Ideal for any infrared-absorbing gases (SiF4, SiF3, CO, CO2, CF4, SF6, NF3, WF6 and other species)​ - Consult factory for your application.
  • Fast response time
  • High sensitivity
  • Species specific
  • No consumables
  • No moving parts


Maintenance section coming soon.




094900000C - MANUAL, USER, OPTI-Sense 5200.pdfOPTI-Sense 5200 Manual1056 KB
ESD Fundamentals - 04786.pdfFundamentals of Electro-Static Discharge (ESD)216 KB
SAL000096C - OPTI-Sense NDIR Monitor.pdfOPTI-Sense Specifications1583 KB
SAL000096D-CN OPTI-Sense NDIR Monitor.pdfOPTI-Sense规格 (Chinese Specification)1906 KB
SAL000107B - Industrial Gas Instruments Overview.pdfIndustrial Gas Instruments Overview545 KB


Measuring Principle
Non Dispersive IR absorption
Application In Situ Measurement
Light Source MEMS-based Pulsed IR Emitter
Corrosion Resistant Optics, Stainless Steel Wetted Parts​
Dimensions (WxHxD) 
4.72” x 8.66” x 3.15” (120 mm x 220 mm x 80 mm)
< 7 lbs (3.17 kg)​
Analog Output
Factory set to 0-1, 5 or 10 volt
​​ Digital Interface
RS-232 C
Response Time
< 10 seconds
Power Requirements
15 VDC - Less than 10 watts
Sample Ports KF16 - 304 SS (for other options, consult factory)
Remote Zeroing Capability
Leak Testing Vacuum Leak-Tight Cell
Embedded (standard)
​​1 year



The OPTI-Sense series of sensors is based on Non-Dispersive Infrared (NDIR) technology. They are designed to precisely measure the absorbance in the infrared spectrum of specialty gases typically found in semiconductor applications. They are very compact and designed with no moving parts, making the OPTI-Sense robust and ideal for continuous in-situ gas monitoring of semiconductor processes.

All OPTI-Sense sensors are configured with analog and digital interfaces, making them easy to integrate into any process. Configurations are available for the measurement of single and dual gas species.