Specialty Process Gas Monitors
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 OPTI-Sense Series

 Non-Dispersive Infrared Monitors


 Features


  • NDIR Non-Dispersive Infrared
  • Ideal for any infrared-absorbing gases (SiF4, SiF3, CO, CO2, CF4, SF6, NF3, WF6 and other species)​
  • Fast response time
  • High sensitivity
  • Species specific
  • No consumables
  • No moving parts
  • GUI LabView software (optional)

 Maintenance

Maintenance section coming soon.

 

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 Downloads

  
  
  
SAL000096A - NDIR.pdfOPTI-Sense Specification2939 KB

 Specifications


Measuring Principle
Non Dispersive IR absorption
Application In Situ Measurement
Light Source Pulsed IR Emitter
​​Materials
Corrosion Resistant Optics, Stainless Steel Wetted Parts​
Dimensions (WxHxD) 
5.00" x 8.75" x 3.25" (including source and detector) 
Weight
< 5 lbs
Analog Output
Factory set to 0-1, 5 or 10 volt
​​ Digital Interface
RS-232 C and optional GUI interface​
Response Time
< 10 seconds
Power Requirements
15 VDC - Less than 10 watts (AC Power Optional)
Sample Ports KF16 - 304 SS (other options available)
Zeroing
Remote Zeroing Capability
Leak Testing Vacuum Leak-Tight Cell
  Software
Embedded (standard) - LabView GUI Interface (optional)
Compliance
CE
​​​Warranty
​​1 year

 Applications

 Description


The OPTI-Sense series of sensors is based on Non-Dispersive Infrared (NDIR) technology. They are designed to precisely
measure the absorbance in the infrared spectrum of specialty gases typically found in semiconductor applications. They are
very compact and designed with no moving parts, making the OPTI-Sense robust and ideal for continuous in-situ gas monitoring of semiconductor processes.

​Built-in diagnostics are included in the embedded software. All OPTI-Sense sensors are configured with analog and digital
interfaces, making them easy to integrate into any process.