Specialty Process Gas Monitors
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 OPTI-Sense Series

 Non-Dispersive Infrared Monitors

OPTI-SENSE NDIR FRONT & BACK.png

 Features


  • Non-Dispersive Infrared (NDIR)
  • Ideal for any infrared-absorbing gases (SiF4, SiF3, CO, CO2, CF4, SF6, NF3, WF6 and other species)​ - Consult factory for your application.
  • Fast response time
  • High sensitivity
  • Species specific
  • No consumables
  • No moving parts

 Maintenance

Maintenance section coming soon.

 

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 Downloads

  
  
  
ESD Fundamentals - 04786.pdfFundamentals of Electro-Static Discharge (ESD)216 KB
SAL000096B - OPTI-Sense NDIR Monitor.pdfOPTI-Sense Specifications1388 KB
SAL000096B-CN - OPTI-Sense NDIR Monitor.pdfOPTI-Sense规格 (Chinese Specification)1431 KB
SAL000107B - Industrial Gas Instruments Overview.pdfIndustrial Gas Instruments Overview545 KB

 Specifications


Measuring Principle
Non Dispersive IR absorption
Application In Situ Measurement
Light Source MEMS-based Pulsed IR Emitter
​​Materials
Corrosion Resistant Optics, Stainless Steel Wetted Parts​
Dimensions (WxHxD) 
5.00" x 8.75" x 3.25" (12.7 cm x 22.2 cm x 8.26 cm)
Weight
< 7 lbs (3.17 kg)​
Analog Output
Factory set to 0-1, 5 or 10 volt
​​ Digital Interface
RS-232 C
Response Time
< 10 seconds
Power Requirements
15 VDC - Less than 10 watts
Sample Ports KF16 - 304 SS (for other options, consult factory)
Zeroing
Remote Zeroing Capability
Leak Testing Vacuum Leak-Tight Cell
  Software
Embedded (standard)
Approvals​
CE
​​​Warranty
​​1 year

 Applications

 Description


The OPTI-Sense series of sensors is based on Non-Dispersive Infrared (NDIR) technology. They are designed to precisely measure the absorbance in the infrared spectrum of specialty gases typically found in semiconductor applications. They are very compact and designed with no moving parts, making the OPTI-Sense robust and ideal for continuous in-situ gas monitoring of semiconductor processes.

All OPTI-Sense sensors are configured with analog and digital interfaces, making them easy to integrate into any process. Configurations are available for the measurement of single and dual gas species.