Catalytic Ozone Destructs
​​​​​​​​​​​​​​​​​​​ Conta​​​ct us
Traini​ng
Sales Contacts
Request a Quote
Terms & Conditions
​​ ​
​​

 CAT-O3 Series

  Catalytic Ozone Destructs​

 

 Features

 

  • All Welded Construction

  • Self Contained

  • Rapid Reaction Time

  • No Consumables

  • No Maintenance

  • Simple Installation

 Maintenance

 

 Maintenance section coming soon.

  ​

 Downloads

  
  
  
CAT-O3_DS_TDY.pdfCatalytic Ozone Destructs Specification189 KB

 Specifications

Model  

CAT -O3-E 

 
Application                                          Catalytic Ozone Destruct  
​Principle of Operation   Catalytic
Capacity (up to)       20 SLMP  at 340 g/Nm3    
Outlet Concentration   < .01 ppm (well below OSHA requirements)
Material       Aluminum with SS fittings
Inlet/Outlets     1/2" stainless steel stubs ( other fittings available)
Outside Cylinder Dimensions (L X D X H)​17.00" X 4.00" X 5.13 "
431.80mm X 101.6 x130.3mm
External TemperatureBelow 30 degrees C or 86 degrees F
MaintenanceNone
Lifetime3 to 5 years or longer
Heater OptionAvailable for wet off gas applications

CAT-O3-F

 
ApplicationCatalytic Ozone Destruct
Principle of OperationCatalytic
CatalystManganese Dioxide based compound
Capacity (up to)36 SLPM at 340 g/Nm3
​Outlet Concentration< .01 ppm (well below OSHA requirements)
External TemperatureBelow 30 degrees C or 86 degrees F
MaintenanceNone
Lifetime3 to 5 years or longer
Heater OptionAvailable for wet off gas applications

​CAT -O3-G

 
ApplicationCatalytic Ozone Destruct
​Principle of OperationCatalytic
CatalystManganese dioxide based compound
Capacity (up to)88 SLPM at 200 g/Nm3
Outlet Concentration< .01 ppm (well below OSHA requirements)
MaterialAluminum with SS fittings
Inlet/Outlets1/2" stainless steel stubs ( other fittings available)
Lifetime3 to 5 years or longer
​Heater OptionAvailable for wet off gas applications​

 Applications

 

  • Semiconductor
    • CVD TEOS/Ozone
    • ALD
    • MOCVD
    • Ashers
    • Wet Benches
    • Spray Tools
    • Other

 Description


The Model CAT-O3 is the IN USA Brand of Teledyne's Ozone Destructs.  These are​ ideal to decompose very high concentration of ozone gas to sub-ppm levels that are well below OSHA's recommended ozone safety guidelines. The method of destruction is catalytic which decomposes passively the ozone (O3) to oxygen (O2).  The Ozone decomposes very simply when in contact with the catalytic material which is metal oxide.  The ozone molecules are held to the catalyst surface by forces comparable in strength to their own chemical bonds. Those bonds are weakened, and ozone decomposes in an exothermic reaction to form oxygen.
The CAT-O3 series of ozone destructs are made of stainless steel welded enclosure with a protective heat shield mounted around them. They are designed for the most stringent safety performance requirements while offering unmatched advantages.​