Production of semi-conductor materials require extremely clean air supply that help ensure the quality of the materials being manufactured as well as specialized gases to enable production to occur smoothly and efficiently.  Teledyne API carries a complete line of Industrial gas process instruments including those that both produce and measure gases in these unique applications. Teledyne API also provides specialty gas instruments designed to help reduce or eliminate Airborne Molecular Contamination (AMC) in the ultra-clean supply gas provided in these processes. ​​

  Ozone Generators
GasModelRanges  
Air Cooled O3 GeneratorAC-SeriesUp to 15% w/w or 225g/Nm3
Water Cooled High Purity OzoneOG 5000OG-5000-A 210 g/hr
OG-5000-B  150g/hr
High Concentration- High Purity Ozone Delivery SystemODSup to 350 g/Nm3
Compact High Purity Ozone Delivery SystemMini-ODSO3 Concentrations over 330g/Nm3 or 21.5% w/w
   
  Specialty Gas Instruments
GasModelRanges  
NDIR
(Non Dispersive Infrared)
Opti-SenseCheck Specification
   
  Dissolved Ozone Instruments
GasModelRanges  
Dissolved OzonedFFOZUp to 150 mg/L (150 ppmw)
Trace Dissolved OzonedFFOZ-TR0 to 1000 ppbw
  Process Ozone Instruments
GasModelRanges 
(Min/Max)
Oxygen Low Level
Safety/Process Measurements
465L0-1 ppm to 0-500 ppm
Ozone
Process Measurements
4520-5 wt% / 0-20 wt%
   
  Ozone Destructs
GasModelRanges  
Catalytic O3 DestructsCAT-03-E,
CAT-03-F,
CAT-03-G
Check Specification
   
  Particulate Instruments
GasModelRanges 
(Min/Max)
Continuous real-time PM Mass MonitoringT640PM2.5, PM10, PM10-2.5
   
  Gas Calibrators & Zero Air Generators
GasModelRanges 
(Min/Max)
All gasesT700UAvailable MFC’s: 0-10 cc/min to 0-20 LPM
T700Available MFC’s: 0-10 cc/min to 0-20 LPM
O3
Ozone
T703Ozone Output: 50 ppb to 10 ppm
T703UOzone Output: 3 ppb to 10 ppm
T753UOzone Output: 2 ppb to 2.5 ppm
   
  Nitrogen Compounds Instruments
GasModelRanges 
(Min/Max)
NH3
Ammonia
T2010-50 ppb / 0-2,000 ppb
   
  Sulfur Compounds Instruments
GasModelRanges 
(Min/Max)
H2S
Hydrogen Sulfide
T1010-50 ppb / 0-5 ppm
TRS
Total Reduced Sulfur
T1020-50 ppb / 0-10 ppm
TS
Total Sulfur
T108U0-5 ppb / 0-10 ppm
T1080-50 ppb / 0-10 ppm