Production of semiconductor materials require extremely clean air supply that help ensure the quality of the materials being manufactured as well as specialized gases to enable production to occur smoothly and efficiently.  Teledyne API carries a complete line of Industrial gas process instruments including those that both produce and measure gases in these unique applications. Teledyne API also provides specialty gas instruments designed to help reduce or eliminate Airborne Molecular Contamination (AMC) in the ultra-clean supply gas provided in these processes. ​​

  Ozone Controller
GasModel Ranges  
Ozonator Controller 
  Specialty Gas Instruments
Gas Model Ranges  
NDIR Monitor
(Non-Dispersive Infrared)
OPTI-Sense Check ​Specification
  Dissolved Ozone Instruments
Gas Model Ranges  
Dissolved Ozone 470 Up to 150 mg/L (150 ppmw)

  Process Ozone Instruments
Gas Model Ranges 
Ozone Low Level
Safety/Process Measurements
465L 0-1 ppm to 0-500 ppm
Process Measurements
452 0-5 wt% / 0-20 wt%
  Ozone Destructs
Gas Model Ranges  
Catalytic O3 Destructs CAT-03-E,
Check Specification
  Particulate Instruments
Gas Model Ranges 
Continuous real-time PM Mass Monitoring T640 PM2.5, PM10, PM10-2.5
  Gas Calibrators & Zero Air Generators
Gas Model Ranges 
All gases T700U Available MFC’s: 0-10 cc/min to 0-20 LPM
T700 Available MFC’s: 0-10 cc/min to 0-20 LPM
T703 Ozone Output: 50 ppb to 10 ppm
T703U Ozone Output: 3 ppb to 10 ppm
T753U Ozone Output: 2 ppb to 2.5 ppm
  Nitrogen Compounds Instruments
Gas Model Ranges 
Ammonia, Nitrogen Oxide, Nitrogen Dioxide​
T201 0-50 ppb / 0-2,000 ppb
  Sulfur Compounds Instruments
Gas Model Ranges 
H2S, SO2
Hydrogen Sulfide, Sulfur Dioxide
T101 0-50 ppb / 0-5 ppm
Total Reduced Sulfur, Sulfur Dioxide
T102 0-50 ppb / 0-10 ppm
Total Sulfur
T108U 0-5 ppb / 0-10 ppm
T108 0-50 ppb / 0-10 ppm