Production of semi-conductor materials require extremely clean air supply that help ensure the quality of the materials being manufactured as well as specialized gases to enable production to occur smoothly and efficiently.  Teledyne API carries a complete line of Industrial gas process instruments including those that both produce and measure gases in these unique applications. Teledyne API also provides specialty gas instruments designed to help reduce or eliminate Airborne Molecular Contamination (AMC) in the ultra-clean supply gas provided in these processes. ​​

Ozone Generators​

Type

Model

Ranges 

Air Cooled Ozone Generator

AC-Series

Up to 15% w/w or 225g/Nm3

Water Cooled High Purity Ozone Generator

OG 5000

OG-5000-A 210 g/hr
OG-5000-B  150g/hr

High Concentration- High Purity Ozone Delivery System

ODS

up to 350 g/Nm3

Compact High Purity Ozone Delivery System

Mini-ODS

O3 Concentrations over 330g/Nm3 or 21.5% w/w

 

 

 

Specialty Gas Instruments​

Gas

Model

Ranges 

NDIR
(Non Dispersive Infrared)

OPTI-Sense

Check Specification

 

 

 

Dissolved Ozone Instruments​

Gas

Model

Ranges 

Dissolved Ozone Measurements

dFFOZ

Up to 150 mg/L (150 ppmw)

Trace Dissolved Ozone Measurements

dFFOZ-TR

0 to 1000 ppbw

Process Ozone Instruments​

Gas

Model

Ranges 
(Min/Max)

Ozone Low Level
Safety/Process Measurements

465L

0-1 ppm to 0-500 ppm

Ozone High Level
Process Measurements

452

0-5 wt% / 0-20 wt%

 

 

 

Ozone Destructs

Gas

Model

Ranges 

Catalytic O3 Destructs

CAT-03-E,
CAT-03-F,
CAT-03-G

Check Specification

 

 

 

Particulate Instruments

Gas

Model

Ranges 
(Min/Max)

Continuous real-time PM10 and PM2.5

T640

0-100% (Paramagnetic)

 

 

 

Gas Calibrators & Zero Air Generators​

Gas

Model

Ranges 
(Min/Max)

All gases

T700U

Available MFC’s: 0-10 cc/min to 0-20 LPM

T700

Available MFC’s: 0-10 cc/min to 0-20 LPM

O3
Ozone

T703

Ozone Output: 50 ppb to 10 ppm

T703U

Ozone Output: 3 ppb to 10 ppm

T753U

Ozone Output: 2 ppb to 2.5 ppm

 

 

 

Nitrogen Compounds Instruments​

Gas

Model

Ranges 
(Min/Max)

NH3
Ammonia

T201

0-50 ppb / 0-2,000 ppb

 

 

 

 

 

 

 

 

Sulfur Compounds Instruments​

Gas

Model

Ranges 
(Min/Max)

H2S
Hydrogen Sulfide

T101

0-50 ppb / 0-5 ppm

TRS
Total Reduced Sulfur

T102

0-50 ppb / 0-10 ppm

TS
Total Sulfur

T108U

0-5 ppb / 0-10 ppm

T108​

0-50 ppb / 0-10 ppm