SCI-552 Controller

Ozone Generators

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SCI-552

Ozonator Controller

Downloads

Type	Title	File Size
	SCI-552 Manual	2011 KB
	Fundamentals of Electro-Static Discharge (ESD)	216 KB
	SCI-552 Specification	3292 KB
	SCI-552规格 (Chinese Specification)	2615 KB

Maintenance

Maintenance section coming soon.

Applications

Chemical Vapor Deposition (CVD)
Atomic Layer Deposition (ALD)
Oxide growth
Surface conditioning
Ashing
Particle Cleaning
Photoresist Removal
Others

Specifications

Display	2 lines x 40 character, alphanumeric, vacuum fluorescent
Resolution	0.01% w/w
Cycle Time	Continuous measurement, refreshed every 2 sec or 0.5 Hz
Digital I/O	RS-232 C, bi-directional
Device I/O Generator Support MFC Control Backpressure Controller Ozone Generator EV Valve Chiller	Designed to support 2 Ozone Generators, industry standard pinout 4 - DB-9 Connectors for 4 MFCs 2 - DB-15 Connectors for 2 Electronic Backpressure regulators 2 - 10 pin IDC header for 2 Ozone Generators 2 - 2 Pin Connectors - 24 VDC 1 - DB-15 Connector for chiller
Customer System I/O Interlocks Serial Digital	1 - System Hardware Interlock 1 - Communications Interlock (user configurable) 1 - Software Interlock (Backpressure) RE-232, DB-25 (Modbus standard - other options available)
AC Power	90 to 240VAC, 50/60 Hz
Typical Power Consumption	Less than 225 W
Dimensions (WxHxD)	19.0" x 7.0" x 9.0" (48.0 cm x 17.8 cm x 22.86 cm)
Weight	10.9 lbs. (4.94 kg)
Environmental	Designed for indoor use only
Operating Temperature	5 - 35°C
Relative Humidity	80%, non-condensing
Compliance	CE
Warranty	1 year
Specifications subject to change without notice. All specifications are based on constant conditions.

Features

RS-232 MODBUS remote support
Control up to 2 Ozone Generators
Interface with up to 2 Model 452 & Model 470 Ozone Sensors
Control up to 4 Mass Flow Controllers
Control up to 2 Backpressure Controllers
Control up to 2 EV Valves
Control a water chiller
System Interlock Inputs
Remote system-level controls and status I/O

Description

The SCI-552 is a system controller for ozone delivery systems that provides electronic control interfaces for a number of typical system components, including: ozone generators, EV valves, mass flow controllers, back-pressure controllers, Teledyne API 452 ozone sensors, Teledyne API 470 dissolved ozone sensors, and a water chiller.

The SCI-552 features hardware and software support for a number of system interlock functions. The SCI-552 provides flexibility for the end user, allowing control of the system via the front panel user interface, MODBUS serial interface, or various discrete digital and analog I/O points. The SCI-552 is designed to support two ozone generators providing two independent channels of ozone output.