SCI-552 Controller

Ozone Generators

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SCI-552

Ozonator Controller

Downloads

Type	Title	File Size
	SCI-552 Specification	3292 KB
	SCI-552 Manual	1404 KB

Maintenance

Maintenance section coming soon.

Applications

Chemical Vapor Deposition (CVD)
Atomic Layer Deposition (ALD)
Oxide growth
Surface conditioning
Ashing
Particle Cleaning
Photoresist Removal
Others

Specifications

Display	2 lines x 40 character, alphanumeric, vacuum fluorescent
Resolution	0.01% w/w
Cycle Time	Continuous measurement, refreshed every 2 sec or 0.5 Hz
Digital I/O	RS-232 C, bi-directional
Device I/O Generator Support MFC Control Backpressure Controller Ozone Generator EV Valve Chiller	Designed to support 2 Ozone Generators, industry standard pinout 4 - DB-9 Connectors for 4 MFCs 2 - DB-15 Connectors for 2 Electronic Backpressure regulators 2 - 10 pin IDC header for 2 Ozone Generators 2 - 2 Pin Connectors - 24 VDC 1 - DB-15 Connector for chiller
Customer System I/O Interlocks Serial Digital	1 - System Hardware Interlock 1 - Communications Interlock (user configurable) 1 - Software Interlock (Backpressure) RE-232, DB-25 (Modbus standard - other options available)
AC Power	90 to 240VAC, 50/60 Hz
Typical Power Consumption	Less than 225 W
Dimensions (WxHxD)	19.0" x 7.0" x 9.0" (48.0 cm x 17.8 cm x 22.86 cm)
Weight	10.9 lbs. (4.94 kg)
Environmental	Designed for indoor use only
Operating Temperature	5 - 35°C
Relative Humidity	80%, non-condensing
Compliance	CE
Warranty	1 year
Specifications subject to change without notice. All specifications are based on constant conditions.

Features

RS-232 MODBUS remote support
Control up to 2 Ozone Generators
Interface with up to 2 Model 452 & Model 470 Ozone Sensors
Control up to 4 Mass Flow Controllers
Control up to 2 Backpressure Controllers
Control up to 2 EV Valves
Control a water chiller
System Interlock Inputs
Remote system-level controls and status I/O

Description

The SCI-552 is a system controller for ozone delivery systems that provides electronic control interfaces for a number of typical system components, including: ozone generators, EV valves, mass flow controllers, back-pressure controllers, Teledyne API 452 ozone sensors, Teledyne API 470 dissolved ozone sensors, and a water chiller.

The SCI-552 features hardware and software support for a number of system interlock functions. The SCI-552 provides flexibility for the end user, allowing control of the system via the front panel user interface, MODBUS serial interface, or various discrete digital and analog I/O points. The SCI-552 is designed to support two ozone generators providing two independent channels of ozone output.