The IN USA Series, a brand of Teledyne API, OG-5000 series of Ozone Generators is designed to produce ultra clean, high purity and very high concentration ozone gas that is ideal for a wide range of Semiconductor process applications.
The OG-5000 Ozone generators produce Ozone gas by exciting molecular oxygen in a high intensity electrical field, which is established by applying an alternating voltage between two electrodes. In order to obtain high intensity electrical fields the two electrode surfaces are placed in very close mechanical proximity. When the strength of the field integrated across the gap is larger than the breakdown voltage of the oxygen that fills the gap, discharges take place, and ozone is generated. The addition of ppm levels of a "doping" or "spiking" gas such as Nitrogen maximizes the ozone output and ensures a highly stable production of ozone over time.
The high purity wetted materials in the OG-5000 Ozone generators series, combined with an innovative cell design, unique sealing technique and a state of the art controller ensures the production of high purity and very high concentration ozone gas to meet the demanding requirements of all applications in the Semiconductor Industry.