​Model ODS
High Concentration​ High Purity Ozone Delivery System


  • High purity water cooled ozone generator up to 350 g/Nm3​
  • State of the art high concentration monitor​
  • Mass Flow Controllers to monitor and control the ozone and the feed gases​
  • Complete safety interlock and EMO system​
  • Supports up to 4 independent servo control loops​
  • Mounted in an 19 inch rack exhausted enclosure on casters​



Maintenance section coming soon.



ESD Fundamentals - 04786.pdfFundamentals of Electro-Static Discharge (ESD)216 KB
SAL000102B - ODS.pdfODS Specification2343 KB
SAL000102B-CN ODS.pdfODS规格 (Chinese Specification)2557 KB
SAL000107A - Industrial Gas Instruments Overview.pdfIndustrial Gas Instruments Overview555 KB


High Purity Ozone Generator
Up to 350 g/Nm3
Flow Rates
Up to 100 lpm regulated by built-in MFCs
Ozone Output Pressure
Regulated to 30 PSIA
Up to 4 independent servo control loops
Ozone Sensor​​​​​
UV absorption analyzer with range from 0 to 400 g/Nm3
Ozone Leak Detection Monitor
Six channels UV absorption
Feed Gas High Grade O2 with N2 doping
Ozone Process Output Channels Up to 4
Enclosure Dimensions Exhausted type: 72 x 24 x 31" (1844 x 615 x 804 mm)
Cooling Water 17ºC to 20ºC (63ºF to 68ºF)​
1 year


Given its versatility and ease of installation and use, the ODS - Ozone Delivery System has been deployed in a wide range of wafer processing applications requiring ozone at different concentration and flow rate such as:

  • Semiconductor​
    • Chemical Vapor Deposition (CVD)
    • Atomic Layer Deposition (ALD)
    • Oxide growth
    • Surface conditioning
    • Particle cleaning
    • Photoresist removal
    • Ashing​​


The ODS series of High Concentration High Purity Ozone Gas Delivery Systems is designed for use in the most demanding
semiconductor applications. This highly reliable ODS is ideal for applications requiring high concentration ozone at a wide range of flow rates. The ODS system is a complete turnkey solution that is custom configured to plug and play with most semiconductor tools.

Its microprocessor based controller is designed to servo control the ozone delivered to the tool based on user provided setpoints.

The ODS system includes a multi-channel ozone leak detector and an exhausted enclosure where all the process gas lines
and fittings are double contained.