ODS Delivery Systems

Ozone Generators

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Model ODS
High Concentration High Purity Ozone Delivery System

Features

High purity water cooled ozone generator up to 350 g/Nm³
State of the art high concentration monitor
Mass Flow Controllers to monitor and control the ozone and the feed gases
Complete safety interlock and EMO system
Supports up to 4 independent servo control loops
Mounted in an 19 inch rack exhausted enclosure on casters

Maintenance

Maintenance section coming soon.

Downloads

Type	Title	File Size
	Fundamentals of Electro-Static Discharge (ESD)	216 KB
	ODS Specification	2343 KB
	ODS规格 (Chinese Specification)	2557 KB

Specifications

High Purity Ozone Generator	Up to 350 g/Nm³
Flow Rates	Up to 100 lpm regulated by built-in MFCs
Ozone Output Pressure	Regulated to 30 PSIA
Controller	Up to 4 independent servo control loops
Ozone Sensor	UV absorption analyzer with range from 0 to 400 g/Nm³
Ozone Leak Detection Monitor	Six channels UV absorption
Feed Gas	High Grade O₂ with N₂ doping
Ozone Process Output Channels	Up to 4
Enclosure Dimensions	Exhausted type: 72 x 24 x 31" (1844 x 615 x 804 mm)
Cooling Water	17ºC to 20ºC (63ºF to 68ºF)
Warranty	1 year

Applications

Given its versatility and ease of installation and use, the ODS - Ozone Delivery System has been deployed in a wide range of wafer processing applications requiring ozone at different concentration and flow rate such as:

Semiconductor

Chemical Vapor Deposition (CVD)
Atomic Layer Deposition (ALD)
Oxide growth
Surface conditioning
Particle cleaning
Photoresist removal
Ashing

Description

The ODS series of High Concentration High Purity Ozone Gas Delivery Systems is designed for use in the most demanding

semiconductor applications. This highly reliable ODS is ideal for applications requiring high concentration ozone at a wide range of flow rates. The ODS system is a complete turnkey solution that is custom configured to plug and play with most semiconductor tools.

Its microprocessor based controller is designed to servo control the ozone delivered to the tool based on user provided setpoints.

The ODS system includes a multi-channel ozone leak detector and an exhausted enclosure where all the process gas lines

and fittings are double contained.