The ODS series is an Ozone Gas Delivery System that is designed to deliver High Purity Ozone gas on demand and very precisely for the most demanding Semiconductor wet or dry wafer processing applications. This highly reliable ODS system is ideal for applications requiring high concentration ozone at a wide range of flow rates. The ODS system is designed to be custom configured to provide up to 4 output lines of continuous ozone gas. With its built in state of the art Microprocessor based controller it is designed to interface to most of the Semiconductor Wafer Processing tools on the market. The ozone is produced on demand remotely and precisely via a closed loop control sub-system that is a subset of the ODS system. Most importantly, the ODS system is designed with very stringent safety guidelines and includes a multi-channel ozone leak detector that interlocks the generators in case of a leak. Furthermore, the system comes in an exhausted enclosure where all the process gas lines and fittings are internally mounted and therefore double contained. Lastly this ODS system is very easy to install and operate.
