The Mini-ODS is an innovative Ozone Delivery System designed to produce high concentrations of ozone for a wide range of wafer processing applications requiring very high ozone concentration 21% w/w, 320 g//Nm3 or more. It is a very compact yet complete ozone delivery system including a High Purity Ozone Generator, a High Concentration Monitor, a powerful Microprocessor based controller and all the required regulators and pneumatics, making the Mini-ODS a turnkey solution.
The Mini-ODS's compact frame and lightweight body combine portable convenience with unparalleled performance, making it superior to other ozone systems on the market. The system is very easy to use and can be custom configured for any unique requirement. The Mini-ODS is expandable to support additional Ozone Generators running independent processes requiring different levels of Ozone concentrations and Flow rates. Optionally the Mini-ODS can interface to a Dissolved Ozone Analyzer typically required in wet processes. It also can be interlocked with Teledyne's NIST traceable UV absorption based Multi-Channel Ozone Leak Detectors and any of Teledyne's Ozone destruct systems. This makes the Mini-ODS the only turnkey solution on the market from a single supplier.
IN USA, a brand of Teledyne API