Mini ODS 

 Compact High-Purity Ozone Delivery SystemSCI-552+SERIES 5000_web.png

 Features


  • Compact design
  • Produces O3 concentrations over 21% w/w
  • 19" rack mountable or table top​
  • Low cost of ownership/no consumables
  • Fully integrated solution including:
    • High Purity Ozone Generator
    • High Concentration Ozone Analyzer
    • Closed Loop Servo Controller
    • Oxygen MFC
    • Nitrogen MFC
    • Back Pressure Regulator
    • Electro-pneumatic divert valve

 Maintenance

​ Maintenance section coming soon.

 Downloads

  
  
  
Mini ODS 9000 Series Manual - 08628.pdfMini ODS Manual847 KB
SAL000104A - Mini ODS.pdfMini ODS Specification3368 KB

 Specifications

Ozone Concentration         
Over 320 g/Nm3 or 21.0% w/w
Ozone Flow Rate
Optimized for 1 slpm (other flow rates available)
​​ Ozone Outlet Pressure
15 to 40 PSIG (typically set at 30 PSIG)
Ambient Temperature
5-35°C
​​ Feed Gas
Oxygen: Grade 6 or better
Nitrogen: Grade 5 or better (for doping only)
Cooling Water     Temperature: 17 to 20°C
Flow Rate: Configuration dependent
Setpoint Controller
Automatic Servo Loop Control
User Programmable Setpoints
  • Generator Power
  • Gas Flow Rate
  • O3 Concentration
​​(controls up to two O3 Generators simultaneously and independently)

 Analyzers

UV O3 Gas Concentration
(UV O3 Dissolved Concentration optional)
Gas Flow Controllers
MFC for O2 and N2 included
Regulator
Back Pressure Regulator included
Display
2 line x 40 character, VFD
Analog I/O
1x Analog Output, 0-5VDC
1x Analog Input, 0-5VDC
​​​​​ Digital I/O
RS-232C, bi-directional
2x Digital Inputs
2x Digital Outputs
​​ Power
208 to 240 VAC, 1Ph or 3Ph
​Dimensions (WxHxD)
19.0" x 13.7" x 18.0" ​(48 cm x 35 cm x 46 cm)
Compliance
​CE
​​Warranty
​1 year
Specifications subject to change without notice. All specifications are based on constant conditions.

 Applications


Semiconductor

  • ​Chemical Vapor Deposition (CVD)
  • Atomic Layer Deposition (ALD)
  • Oxide growth
  • Surface conditioning
  • Particle cleaning
  • Photoresist removal
  • Ashing

 Description

The Mini ODS is a compact, integrated ozone delivery system designed to produce ozone concentrations of 21% w/w, 320g/Nm3 for a wide range of wafer processing applications. It is a very compact yet complete ozone delivery system, including: a high purity ozone generator, high concentration ozone monitor, microprocessor based controller, and all the required regulators and pneumatics.

The Mini ODS is expandable to support additional ozone generators running independent processes that require different levels of ozone concentrations and flow rates. The system is easy to use and maintain. There are no consumables or requirements for preventive maintenance. 

The Mini ODS can also interface to a​ dissolved ozone analyzer typically required in wet processes. For added safety, it can be interlocked with Teledyne API’s multichannel ozone leak detectors and ozone destruct sub-systems.​