Mini ODS 

 Compact High-Purity Ozone Delivery SystemSCI-552+SERIES 5000_web.png


  • Compact design
  • Produces O3 concentrations over 21% w/w
  • 19" rack mountable or table top​
  • Low cost of ownership/no consumables
  • Fully integrated solution including:
    • High Purity Ozone Generator
    • High Concentration Ozone Analyzer
    • Closed Loop Servo Controller
    • Oxygen MFC
    • Nitrogen MFC
    • Back Pressure Regulator
    • Electro-pneumatic divert valve


​ Maintenance section coming soon.


ESD Fundamentals - 04786.pdfFundamentals of Electro-Static Discharge (ESD)216 KB
Mini ODS 9000 Series Manual - 08628.pdfMini ODS Manual847 KB
SAL000104A - Mini ODS.pdfMini ODS Specification3368 KB
SAL000104A-CN Mini ODS.pdfMini ODS规格 (Chinese Specification)2831 KB
SAL000107A - Industrial Gas Instruments Overview.pdfIndustrial Gas Instruments Overview555 KB


Ozone Concentration         
Over 320 g/Nm3 or 21.0% w/w
Ozone Flow Rate
Optimized for 1 slpm (other flow rates available)
​​ Ozone Outlet Pressure
15 to 40 PSIG (typically set at 30 PSIG)
Ambient Temperature
​​ Feed Gas
Oxygen: Grade 6 or better
Nitrogen: Grade 5 or better (for doping only)
Cooling Water     Temperature: 17 to 20°C
Flow Rate: Configuration dependent
Setpoint Controller
Automatic Servo Loop Control
User Programmable Setpoints
  • Generator Power
  • Gas Flow Rate
  • O3 Concentration
​​(controls up to two O3 Generators simultaneously and independently)


UV O3 Gas Concentration
(UV O3 Dissolved Concentration optional)
Gas Flow Controllers
MFC for O2 and N2 included
Back Pressure Regulator included
2 line x 40 character, VFD
Analog I/O
1x Analog Output, 0-5VDC
1x Analog Input, 0-5VDC
​​​​​ Digital I/O
RS-232C, bi-directional
2x Digital Inputs
2x Digital Outputs
​​ Power
208 to 240 VAC, 1Ph or 3Ph
​Dimensions (WxHxD)
19.0" x 13.7" x 18.0" ​(48 cm x 35 cm x 46 cm)
​1 year
Specifications subject to change without notice. All specifications are based on constant conditions.



  • ​Chemical Vapor Deposition (CVD)
  • Atomic Layer Deposition (ALD)
  • Oxide growth
  • Surface conditioning
  • Particle cleaning
  • Photoresist removal
  • Ashing


The Mini ODS is a compact, integrated ozone delivery system designed to produce ozone concentrations of 21% w/w, 320g/Nm3 for a wide range of wafer processing applications. It is a very compact yet complete ozone delivery system, including: a high purity ozone generator, high concentration ozone monitor, microprocessor based controller, and all the required regulators and pneumatics.

The Mini ODS is expandable to support additional ozone generators running independent processes that require different levels of ozone concentrations and flow rates. The system is easy to use and maintain. There are no consumables or requirements for preventive maintenance. 

The Mini ODS can also interface to a​ dissolved ozone analyzer typically required in wet processes. For added safety, it can be interlocked with Teledyne API’s multichannel ozone leak detectors and ozone destruct sub-systems.​