The Model dFFOZ is a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in DI water or Sulfuric baths with concentrations above 150 mg/L . The Model dFFOZ (dissolved Full Flow Ozone) is “clean-ready" for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM. The Model dFFOZ Sensor incorporates an innovative dual optical-path sample sensing technology (patented) to provide unparalleled performance and virtually eliminate the need for a reference gas measurement. A typical installation consists of the Model dFFOZ Sensor, a controller (Mini-SCI or SCI-Turbo), and an interconnecting Teflon7-jacketed cable. The Mini-SCI controller is microprocessor based and provide the ability to display remotely the concentration that is being measured while interfacing via analog or digital signals to the wet bench tool that it is part of.
IN USA, a brand of Teledyne API