Dissolved Ozone Instruments
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 Model dFFOZ

 Dissolved Ozone Analyzer




  • In-situ monitoring

  • In-line, full-flow capability

  • Straight-through flow path

  • No moving parts

  • No consumables

  • Ranges up to 150 mg/L

  • Remote AutoZero

  • High accuracy UV Absorption method

  • Dual optical-path sample sensing technique

  • No regular maintenance required

  • Semiconductor-grade wetted materials

  • Compact FRPP enclosure

  • Teflon7-jacketed interconnection cable

  • Controller for up to 4 sensors


Maintenance section coming soon.





dFFOZ Inline Sensor - 610-0014-01.pdfdFFOZ Inline Sensor Manual325 KB
ModeldFFOZ.pdfDissolved Ozone Specification150 KB


​Sensor  Model dFFOZTM, smart, plug-in sensor with on-board calibration data
Application  Dissolved ozone, continuous, in-situ 
Measuring Principle

UV Absorption, dual optical-path sample sensing technique (patented)

UV Light Source  Low pressure mercury vapor lamp
Units of Measure  ppm,w, mg/L 
 Range  Up to 150 mg/L (150 ppmw) several lower ranges available)
Precision < 0.5 mg/L or 1% of reading (whichever is greater) 
Water Flow  Up to 150 SLPM (ultralow flow ranges available)
Sample Ports 1”, 3/4”, 1/2”, 3/8” Flaretek® fittings (others available)
MAX Pressure  55 PSI 
  Wetted Materials  PFA, Teflon® , sapphire, compatible with semiconductor processes​

Enclosure   FRPP ( fire-retardant polypropylene) with purge port-standard- others available depending on application

5.4” W x 6.8” H x 3.2” - mounted vertically ( 138 x 171 x 82 mm)

Maintenance  UV lamp replacement every 24 months. No other scheduled maintenance 
Cable  Teflon - jacketed
Display   20 character, alphanumeric, backlit LCD
Resolution  0.1 ppm, or 0.1 mg/L
Cycle Time   Continuous Measurement 0.5 sec or 2 HZ sampling rate
Analog Outputs ​4 to 20 mA and 0 to 10 VDC, opto-isolated​

Digital I/O ​ RS-232C, bi-directional
​ International diagnostics, instrument error relay

​Remote AutoZero Standard

​90 to 240 VAC 50/60Hz

​5.6” W x 2.8” H x 9.5” D
(143 x 71 x 241 mm)

Compliance  CE


The Model dFFOZ  is a state-of-the-art Dissolved Ozone Sensor designed for semiconductor Wet Bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in DI water or Sulfuric baths with concentrations above 150 mg/L . The Model dFFOZ (dissolved Full Flow Ozone) is “clean-ready" for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM. The Model dFFOZ Sensor incorporates an innovative dual optical-path sample sensing technology (patented) to provide unparalleled performance and virtually eliminate the need for a reference gas measurement.  A typical installation consists of the Model dFFOZ Sensor, a controller (Mini-SCI or SCI-Turbo), and an interconnecting Teflon7-jacketed cable. The Mini-SCI controller is microprocessor based and provide the ability to display remotely the concentration that is being measured while interfacing via analog or digital signals to the wet bench tool that it is part of.  ​

IN USA, a brand of Teledyne API